260807-K2-1

Type: Synthesis

ObjectId: 38471

Created: 8/7/2026 11:37:22 AM by Bochum) Fernandes Joshua [joshua.fernandes@rub.de]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description:

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Type Name Value Comment
general process parameters
String chamber K2 K<i> (for example, "K7")
Int problem occured? 0 1 - Yes, 0 - No
String operator Elaheh
String assistant Joshua
Float start vacuum 3.2e-008 Torr
Float process duration 900 s
Float substrate temperature 25 °C
Float substrate rotation 30 RPM
String process gas Ar
Float flow RG 1 80 sccm
Float table height 88.6 mm
Float process pressure 5 mTorr
Float flow PG 60 sccm
target source configuration
Cathode 1
String target material Mo
Mag1-RF
Float ignition power cathode 1 50 W
Float pre clean power 1 50 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 20 mTorr
Float power forward cathode 1 50 W
Float set power forward cathode 1 50 W
Float act power forward cathode 1 50 W
Float power reflected cathode 1 0 W
Cathode 2
String target material Ru
Mag2-DC
Float ignition power cathode 2 50 W
Float pre clean power 2 50 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 20 mTorr
Float power cathode 2 230 W
Float set power cathode 2 230 W
Float act power cathode 2 229 W
Float voltage cathode 2 397.2 V
Float current cathode 2 0.58 A
Cathode 3
String target material Co
Mag3-RF
Float ignition power cathode 3 50 W
Float pre clean power 3 50 W
Float pre clean time 3 300 s
Float pre clean pressure cathode 3 20 mTorr
Float power forward cathode 3 172 W
Float set power forward cathode 3 172 W
Float act power forward cathode 3 172 W
Float power reflected cathode 3 0 W
Cathode 4
String target material Mn
Mag4-RF
Float ignition power cathode 4 5 W
Float pre clean power 4 50 W
Float pre clean time 4 300 s
Float pre clean pressure cathode 4 20 mTorr
Float power forward cathode 4 200 W
Float set power forward cathode 4 200 W
Float act power forward cathode 4 200 W
Float power reflected cathode 4 0 W
Cathode 5
String target material Fe
Mag5-DC
Float ignition power cathode 5 50 W
Float pre clean power 5 50 W
Float pre clean time 5 300 s
Float pre clean pressure cathode 5 20 mTorr
Float power cathode 5 15 W
Float set power cathode 5 15 W
Float act power cathode 5 14 W
Float voltage cathode 5 212.7 V
Float current cathode 5 0.07 A

The table

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