260216-K7-1

Type: Synthesis

ObjectId: 27315

Created: 2/17/2026 3:10:23 PM by Bochum) Fernandes Joshua [joshua.fernandes@rub.de]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: Deposition of a ~5nm Pt layer on a Cantor film.

[no file attached]

Associated Objects

No associated objects found.

All properties (except table)

Include all template properties
Type Name Value Comment
Int Main4Printing 1 Set it up to 1 for the main synthesis document for printing
general process parameters
String chamber K7 K<i> (for example, "K7")
Int problem occured? 0 1 - Yes, 0 - No
String operator Anagha
String assistant Joshua
Float start vacuum 1.41e-006 Torr
Float process duration 2827 s
Float substrate temperature 24 °C
Float substrate rotation 30 RPM
Float cathode tilt 10 mm
Float process pressure 3.75 mTorr
target source configuration
Cathode 1
String target material Pt
String target ID 2
Mag1-DC
Float ignition power cathode 1 20 W
Float pre clean power 1 20 W
Float pre clean time 1 300 s
String pre clean pressure cathode 1 20 mTorr
Float power cathode 1 30 W
Float set power cathode 1 30 W
Float act power cathode 1 30 W
Cathode 2
String target material Ti
String target ID 2
Mag2-DC
Float ignition power cathode 2 20 W
Float duration per step cathode 2 600 s
Float pre clean power 2 20 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 20 mTorr
Float power cathode 2 30 W
Float set power cathode 2 30 W
Float act power cathode 2 30 W
Float voltage cathode 2 247 V
Float current cathode 2 0.123 A
Cathode 3
String target material HEA
String target ID 3
Mag3-DC
Float ignition power cathode 3 20 W
Float pre clean power 3 20 W
Float pre clean time 3 300 s
Float pre clean pressure cathode 3 20 mTorr
Float power cathode 3 30 W
Float set power cathode 3 30 W
Float act power cathode 3 30 W
Float voltage cathode 3 280 V
Float current cathode 3 0.109 A

The table

   Download properties in Excel

No properties for rendering in a table found