260121-K7-1

Type: Synthesis

ObjectId: 26958

Created: 2/11/2026 1:23:48 PM by Bochum) Fernandes Joshua [joshua.fernandes@rub.de]

Updated: 2/11/2026 1:28:24 PM by Bochum) Fernandes Joshua [joshua.fernandes@rub.de]

Access: Public Sort Code (asc): 0

License: CC BY 4.0

Description: Deposition of Cantor on a Ti adhesion layer

[no file attached]

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All properties (except table)

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Type Name Value Comment
Int Main4Printing 1 Set it up to 1 for the main synthesis document for printing
general process parameters
String chamber K7 K<i> (for example, "K7")
Int problem occured? 0 1 - Yes, 0 - No
String operator Anagha
String assistant Joshua Fernandes
Float start vacuum 1.36e-006 Torr
Float process duration 720 s
Float substrate temperature 24 °C
Float substrate rotation 30 RPM
String process gas Ar
Float cathode tilt 10 mm
target source configuration
Cathode 2
String target material Ti
String target ID 2
Mag2-DC
Float ignition power cathode 2 30 W
Float pre clean power 2 20 W
Float pre clean time 2 300 s
Float pre clean pressure cathode 2 20 mTorr
Float power cathode 2 30 W
Float voltage cathode 2 280 V
Float current cathode 2 0.106 A
Cathode 3
String target material HEA
String target ID 3
Mag3-DC
Float ignition power cathode 3 30 W
Float pre clean power 3 20 W
Float pre clean time 3 300 s
Float pre clean pressure cathode 3 20 mTorr
Float power cathode 3 30 W
Float voltage cathode 3 224 V
Float current cathode 3 0.138 A

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